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About SEH

 Patents Issused in 2001

The following is a list of the patents awarded to SEH during 2001. Each US patent's title will link to a full text of that patent on the United States Patent and Trademark Office web site.

Patent No. Title Issued Inventor(s)
US
 6,171,389
Methods of Producing Doped Semiconductors 1/9/01 Anderson (Douglas)
US
 6,174,349
Continuous Effluent Gas Scrubber System and Method 1/16/01 DeSantis (Nicholas)
US
 6,176,923
Crucible with Differentially Expanding Release Mechanism 1/23/01 Heid
US
 6,179,914
Dopant Delivery System and Method 1/3/01 Aydelott
US
 6,183,556
Insulating and Warming Shield for a Seed Crystal and Seed Chuck 2/6/01 Aydelott, Groat
US
 6,183,637
Resin Trap Device for Use in Ultrapure Water Systems and Method of Purifying Water Using Same 2/6/01 Boyce
US
 6,184,154
Method of Processing the Backside of a Wafer Within an Epitaxial Reactor Chamber 2/6/01 Dietze, Kononchuk
US
 6,186,569
Heater Sling 2/13/01 Heid
US
 6,187,091
Apparatus and Process for Growing Silicon Epitaxial Layer 2/13/01 Hamilton
US
 6,189,176
High Pressure Gas Cleaning Purge of a Dry Process Vacuum Pump 2/20/01 Ivey
US
 6,190,453
Growth of Epitaxial Semiconductor Material with Improved Crystallographic Properties 2/20/01

Boydston, Dietze, Kononchuk

US
 6,197,373
Gas Injection Methods for a LPCVD Furnace 3/6/01 Brown (Pat)
US
 6,199,577
Pressure Relief System for Chemical Storage Tanks 4/13/01 Bomber, Hamilton (Michael)
US
 6,200,202
System and Method for Supplying Slurry to a Semiconductor Processing Machine 4/13/01 Eastman, Wells
US
 6,225,136
Method of Producing a Contaminated Wafer 5/1/01 Tansy, Lydon
US
 6,228,165
Method of Manufacturing Crystal of Silicon Using an Electric Potential 5/8/01 Kirkland, Taie
US
 6,246,029
High Temperature Semiconductor Crystal Growing Furnace Component Cleaning Method 6/12/01 Addis
US
 6,247,737
Holding Ring Tool 6/19/01 Aydelott
US
 6,249,953
Method For Assembling Portions of a Pulling Chamber 6/26/01 Aydelott
US
 6,250,698
Purge Tube Ring Removal Tool 6/26/01 Aydelott
US
 6,254,673
Auxiliary Vacuum Apparatus and Method for Crystal Growth 7/3/01 Johnson (Aaron), LaBrie, Spradlin
US
 6,254,674
Method of Controllably Delivering Dopant by Limiting the Release Rate of Dopant From a Submerged Vessel 7/3/01 Aydelott
US
 6,257,961
Rotational Speed Adjustment for Wafer Polishing Method 7/10/01 Suzuki
US
 6,258,177
Apparatus for Cleaning the Grooves of Lapping Plates 7/10/01 Eastman
US
 6,262,855
Infrared Laser Beam Viewing Apparatus 7/17\01 Greisz
US
 6,275,293
Method for Measurement of OSF Density 8/14/01 Brown (Timothy)
US
 6,284,896
Method of Determining the Thickness of a Layer on a Silicon Substrate 9/4/01 Dietze, Kononchuk
US
 6,286,685
System and Method for Wafer Thickness Sorting 9/11/01 Kononchuk, Martin
US
 6,306,197
Isopropyl Alcohol Scrubbing System 10/23/01 Boyce
US
 6,325,983
NOX Scrubbing System and Method 12/04/01 Bomber,
Boyce