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 Patents Issused in 2002
The following is a list of the patents awarded to SEH during 2002. Each US patent's title will link to a full text of that patent on the United States Patent and Trademark Office web site.
US
6,338,756 |
IN-SITU
EPITAXIAL TREATMENT PROCESS |
01/15/02 |
Dietze |
US
6,339,011 |
Method Of
Forming Semiconductive Active Area Having A Proximity Gettering Region
Therein And Method Of Processing A Monocrystalline Silicon Substrate
To Have A Proximity Gettering Region |
01/15/02 |
Koveshnikov |
US
6,346,460 |
Low Cost
Silicon Substrate With Impurity Gettering and Latch Up Protection and
Method of Manufacture |
02/12/2002 |
Kononchuk,
Koveshnikov |
US
6,348,870 |
Melt Spill
Indicator Device |
02/19/2002 |
Anderson
Aydelott |
US
6,350,315 |
Methods of Producing
Doped Semiconductors |
02/26/2002 |
Anderson |
US
6,352,071 |
Apparatus and
Method for Reducing Bow and Warp in Silicon Wafers Sliced by a Wire
Saw |
03/05/2002 |
Kononchuk
Preece |
US
6,354,794 |
Method For
Automatically Transferring Wafers Between Wafer Holders in a Liquid Environment |
03/12/2002 |
Sato
Fukabori
Mulkaino |
US
6,370,972 |
Chemical
Sampling Sink |
4/16/2002 |
Bomber
Hamilton |
US
6,375,749 |
Susceptorless
Semiconductor Wafer Support and Reactor System For Epitaxial
Layer Growth |
4/23/2002 |
Boydston
Dietze
Hartmann |
JP
3294856 |
Heat
Shield Assembly and Method for Improving Mechanical Strength of the
Neck
section of CZ Silicon Crystal |
4/5/2002 |
Tamura
Wijaranakula |
US
6,395,085 |
Purity Silicon
Wafer for Use in Advanced Semiconductor Devices |
5/28/2002 |
Dietze
Hanna (Sean)
Radzimski |
| US 6,398,382 |
Apparatus and
Method for Indicating Liquid Level in a Chemical Tank |
6/4/2002 |
Boyce
Brinkman |
| US 6,402,957 |
Bromine Biocide
Removal |
6/11/2002 |
Boyce |
| US 6,409,463 |
Apparatuses and
Methods for Adjusting a Substrate Centering System |
6/25/2002 |
Croft (Brett)
Huston (Michael |
| US 6,416,391 |
Method of
Dismounting Wafers after Polishing |
7/9/2002 |
Kononchuk
Radzimski |
| US 6,416,392 |
Sound Enhanced
Lapping Process |
7/9/2002 |
Fitzgerald,
Swanson, Zinser |
| US 6,416,669 |
Resin Trap
Device for Use in Ultrapure Water Systems and method |
7/9/2002 |
Boyce,
Marchando, Webster |
| US 6,423,556 |
Method for
Evaluating Impurity Concentrations in Heat Treatment Furnaces |
7/23/2002 |
Koveshnikov,
Anderson |
| US 6,426,133 |
Graphite
Material Coated with Silicon Carbide |
7/30/2002 |
Salstrom |
| US 6,439,856 |
Inline Stroke
Counter for Air Pumps |
8/27/2002 |
Ivey |
| US 6,453,742 |
System and
Method for Calibrating Semiconductor Processing Equipment |
9/24/2002 |
White,
Kraxberger |
| US 6,454,852 |
High Efficiency
Silicon Wafer Optimized for Advanced Semiconductor Devices |
9/24/2002 |
Dietze, Hanna
(Sean), Radzimski |
| US 6,457,929 |
Apparatus and
Method for Automatically Transferring Wafers between Wafer Holders in
a Liquid Environment |
10/1/2002 |
Sato, Fukabori,
Mukaino |
| US 6,471,771 |
In-Situ Post
Epitaxial Treatment Process |
10/29/2002 |
Dietze |
| US 6,475,385 |
Resin
Trap Device for Use in Ultrapure Water Systems & Method of Purifying
Water Using Same |
11/5/2002 |
Boyce,
Marchando, Webster |
| US 6,482,749 |
Method for
Etching a Wafer Edge Using Potassium-Based Chemical Oxidizer in the
Presence of Hydrofluoric Acid |
11/19/2002 |
Harrison,
Huang, Billington |
| US 6,488,768 |
Method and
Apparatus for Treating Discharge Gas from a CZ Crystal Growing Chamber
Utilizing Water Spray |
12/3/2002 |
Nettleton |
| US 6,497,765 |
Multi Piece
Swivel Chuck for Holding Conical Shaped Work |
12/24/2002 |
Nice |
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