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 Patents Issused in 2003
The following is a list of the patents awarded to SEH during 2003. Each US patent's title will link to a full text of that patent on the United States Patent and Trademark Office web site.
| US 6,503,363 |
System for
Reducing Wafer Contamination Using Freshly, Conditioned Alkaline
Etching Solution |
1/7/2003 |
Nakano, Sato,
West |
| US 6,506,667 |
Growth of
Epitaxial Semiconductor Material with Improved Crystallographic
Properties |
1/14/2003 |
Boydston,
Dietze, Kononchuk |
| US 6,514,337 |
Method
of Growing Large-Diameter Dislocation-Free <110> Crystalline
Ingots |
2/4/2003 |
Nettleton,
Faulconer, Johnson (Aaron) |
| JP 2003-505335 |
Method of
Manufacturing Crystal of Silicon Using an Electric Potential |
2/12/2003 |
Uchikawa, Taie,
Rudberg, Kirkland, Baba, Sonokawa |
| US 6,547,646 |
System and
Method for Supplying Slurry to a Semiconductor Processing Machine |
4/15/2003 |
Eastman, Wells,
Shepherd |
| US 6,562,128 |
In-Situ Post
Epitaxial Treatment Process |
5/13/2003 |
Dietze,
Kononchuk |
| US 6,565,651 |
Optimized
Silicon Wafer Strength for Advanced Semiconductor Devices |
5/20/2003 |
Dietze, Hanna
(Sean), Radzimski |
| US 6,565,652 |
High
Resistivity Silicon Wafer and Method of Producing Same Using the
Magnetic Field CZ Method |
5/20/2003 |
Kononchuk,
Koveshnikov, Radzimski, Weaver |
| US 6,569,749 |
Silicon and
Oxygen Ion Co-Implanation for Metallic Gettering in Epitaxial Wafers |
5/27/03 |
Wijaranakula,
Ravi, Tate |
| US 6,570,663 |
Calibration
Method and Device for Visual Measuring Systems |
5/27/03 |
Altukoff,
Mayer, White (Barton) |
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