SEH America, Inc.

	Product Overview

	Stock Products

Silicon Wafer Surface Metal Standards

SEH America offers one or more metallic elements of a customer-specified concentration deposited on a silicon wafer surface, and an analysis report of surface metal standards characterized by TXRF, GFAA, and/or ICP-AES with each order. Our proprietary method permits reliable preparation of many elements on a single wafer.

Our product can be used for:

Calibration and Control Standards
Interlaboratory Correlations
Repeatability & Reproducibility Studies
Process Development & Troubleshooting
Gettering Studies

The product features a stable surface condition developed in a Class-10 environment. SEH-A's 150mm and 200mm superior quality wafers are available for surface metal and spot standards.

Products

Single Element Surface Metal
Element	Lower Concentration	Upper Concentration
Al	5 e¹⁰/cm²	1 e¹⁴/cm²
Ca	2 e¹⁰/cm²	1 e¹⁴/cm²
Cr	2 e¹⁰/cm²	1 e¹⁴/cm²
Cu	5 e¹⁰/cm²	1 e¹³/cm²
Fe	2 e¹⁰/cm²	1 e¹⁴/cm²
K	2 e¹⁰/cm²	5 e¹³/cm²
Na	2 e¹⁰/cm²	5 e¹³/cm²
Ni	5 e¹⁰/cm²	1 e¹⁴/cm²
Zn	2 e¹⁰/cm²	1 e¹³/cm²

Multi-Element Surface Metals
Option	Elements	Standard Concentration per Element
A (GFAA)	Al, Ca, Cr, Cu, Fe, K, Na, Ni, Zn	~1 e¹¹/cm²
B (TXRF)	Ca, Co, Cr, Cu, Fe, Mn, Ni, Ti, V, Zn	~1 e¹¹cm/²

Prices

Products	Single Element	Multi-Element
Standard	$600	$850
Custom * (One or more element distributed across a silicon wafer surface)	$750	$1000
Spot * (One or more elements localized on a single silicon wafer surface)	$750	$100 per add'l element
10% discount on orders of 10 or more wafers. Prices and conditions subject to change.

* Elements available for Custom and Spot Orders: Al, Ba, Be, Ca, Cd, Co, Cr, Cs, Cu,
Fe, Ga, In, K, Li, Mg, Mo, Mn, Na, Ni, Pb, Rb, Sn, Sr, Ta, Th, Ti, U, V, W, Zn, Zr

Delivery

Standard orders will be delivered in 3 to 4 weeks.
Custom orders may take longer.

To order, or for more information, contact:

SEH America, Inc.
P.O. Box 8965
MS# 40-1-875
Vancouver, WA 98668-8965

Phone: (360) 885-8282
E-Mail: metal_stds@sehamerica.com